Navigate Samples Easily with Wide Field Optics™

Begin with a clear SEM overview at magnifications as low as 2×. Wide Field Optics™ supports fast, confident movement across large, complex, or tilted samples without switching to an optical camera.

Image Non-Conductive or Sensitive Samples with Low Vacuum modes Modes

Use SingleVac™ for quick charge reduction or MultiVac with gaseous SE detection to capture detailed topography on uncoated, beam-sensitive, or outgassing materials.

Achieve Reliable Imaging and Analysis with In-Flight Beam Tracing™

Maintain optimal imaging and analytical conditions automatically and switch between them with a single click. No need for mechanical adjustments.

Protect Hardware with the Essence™ 3D Collision Model

Move with confidence during stage rotations or tilt. VEGA^™’s real-time 3D collision simulation models detectors, samples, and chamber geometry to prevent unwanted contact.

Analyze Composition Rapidly with Integrated Essence™ EDS

Correlate morphology and elemental data in the same live SEM window. Essence™ EDS streamlines setup and provides instant access to spectra, maps, and profiles.

Expand Analytical Capability with Modular Detector Options

Adapt workflows with optional BSE detectors, CL, ONCam™ optical navigation or other detectors. VEGA^™ supports scalable analytical configurations for evolving laboratory needs.